Application of Multidimensional Force Sensor in Measuring Breeze Speed

Dong Panhao, Rong Feng, Huang Chen


For the measurement of the micro wind speed, the size, accuracy and sensitivity of the measurement device have higher requirements, so most wind speed measurement instruments are difficult to achieve the wind speed measurement standards in the market. Based on the principle of wind load, the method of measuring wind speed using MEMS multidimensional force sensor is studied. Through the wind the ball, the sensor sensitive beam with sensitive strain measure pressure from X, Y, Z direction. Effective synthetic velocity and resultant wind direction can be obtained, through the relationship between pressure and wind velocity. Compared with the conventional mechanical wind speed measuring instruments on the market, it has the characteristics of simple structure and fast responding, and has no traditional mechanical components.


MEMS; Micro wind speed; Multidimensional sensor; Strain gauge.

Full Text:



Liu Guoyu. “Testing System on Differential-type Vibrating Wire Sensors with High Accuracy and High Stability.” Instrument Technique and Sensor, vol.5, pp. 84-87, 2013.

Gao You. “Disturbing Problems Solving of Course of Steel Vibrating Wire Sensors Measuring.” Instrument Technique and Sensor, vol.2, pp. 54-55, 2007.

Xia Tianxiang. “Design of Vibrating Wire Sensor Signal Acquisition Instrument.” Dalian University of Technology, 2013

Liu H, Lin N, Pan S, et al. “High sensitivity, miniature, full 2-D anemometer based on MEMS hot-film sensors” IEEE Sens. J., vol13, pp.1914-1920, 2013.

Wang Weizhong, Zhao Yulong, Lin Qijing. “Design and Performance Test of MEMS Tri-Axial Mirco-Force Probe Sensor.” Nanotechnology and Precision Engineering, vol.9, pp.199-202, 2011

Lin Qijing, Zhao Yulong, Jiang Zhuangde, Wang Xinyao, Wang Weizhong. “Three-Axis Micro-Force Sensor Based on a Mechanical Probe.” MEMS Device & Technology, vol.46,pp.231-235,2009.

Zhang Guojun, Chen Shang, Xue Chenyang, Qiao Hui, Zhang Kairui. “The design of a novel piezoresitive two-axis accelerometer based on silicon.” Chinese Journal of Scientific Instrument,vol.30,pp.1940-1945,2009.

Xi Benqiang, He Yi. “The Calculation Method of Three-Way Force Sensor Calibration.” Instrument Technique and Sensor, vol.27, pp. 1187-1190, 2014.

Xiang Gaolin, Lu Yongle, Liu Yu, Gong Dawei, Lv Ling, Wu Linzhi. “A calibration and compesation scheme of MEMS accelerometer based on the improved six position method.” Journal of Chongqing University of Posts and Telecommunications(Natural Science Edition),vol.29, pp.62-67,2017

Zhang Jingzhu, Guo Kai, Xucheng. “Application study on static decoupling algorithms for six-dimensional force sensor.” Transducer and Microsystems Technologies, vol.26, pp.58-59+62, 2007.

Xu Kejun, Li Cheng. “Research on Static Decoupling for Multi-Dimensional Wrist Force Sensor.” Journal of Hefei University of Technology(Natural Science Edition), vol.22, pp.3-8,1999





About ASRJETS | Privacy PolicyTerms & Conditions | Contact Us | DisclaimerFAQs 

ASRJETS is published by (GSSRR).